Cita APA

Martil De La Plaza, I., González Díaz, G., Martínez, F., Selle, B., & Sieber, I. (1998). Influence of rapid thermal annealing processes on the properties of SiNx: H films deposited by the electron cyclotron resonance method. Elsevier Science BV.

Citación estilo Chicago

Martil De La Plaza, Ignacio, Germán González Díaz, F.L Martínez, B. Selle, y I. Sieber. Influence of Rapid Thermal Annealing Processes On the Properties of SiNx: H Films Deposited By the Electron Cyclotron Resonance Method. Elsevier Science BV, 1998.

Cita MLA

Martil De La Plaza, Ignacio, et al. Influence of Rapid Thermal Annealing Processes On the Properties of SiNx: H Films Deposited By the Electron Cyclotron Resonance Method. Elsevier Science BV, 1998.