Mass sensing for the advanced fabrication of nanomechanical resonators

We report on a nanomechanical engineering method to monitor matter growth in real time via e-beam electromechanical coupling. This method relies on the exceptional mass sensing capabilities of nanomechanical resonators. Focused electron beam-induced deposition (FEBID) is employed to selectively grow...

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Autores: Gruber, G., Urgell, C., Tavernarakis, A., Stavrinadis, Alexandros, Tepsic, S., Magén, César, Sangiao, S., Teresa, José María de, Verlot, P., Bachtold, Adrian
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2019
País:España
Institución:Consejo Superior de Investigaciones Científicas (CSIC)
Repositorio:DIGITAL.CSIC. Repositorio Institucional del CSIC
OAI Identifier:oai:digital.csic.es:10261/208005
Acceso en línea:http://hdl.handle.net/10261/208005
Access Level:acceso abierto
Palabra clave:Mechanical resonators
NEMS
Nanofabrication
Mass sensing
Carbon nanotubes
Electron microscopy
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spelling Mass sensing for the advanced fabrication of nanomechanical resonators Gruber, G. Urgell, C. Tavernarakis, A. Stavrinadis, Alexandros Tepsic, S. Magén, César Sangiao, S. Teresa, José María de Verlot, P. Bachtold, Adrian Mechanical resonators NEMS Nanofabrication Mass sensing Carbon nanotubes Electron microscopy We report on a nanomechanical engineering method to monitor matter growth in real time via e-beam electromechanical coupling. This method relies on the exceptional mass sensing capabilities of nanomechanical resonators. Focused electron beam-induced deposition (FEBID) is employed to selectively grow platinum particles at the free end of singly clamped nanotube cantilevers. The electron beam has two functions: it allows both to grow material on the nanotube and to track in real time the deposited mass by probing the noise-driven mechanical resonance of the nanotube. On the one hand, this detection method is highly effective as it can resolve mass deposition with a resolution in the zeptogram range; on the other hand, this method is simple to use and readily available to a wide range of potential users because it can be operated in existing commercial FEBID systems without making any modification. The presented method allows one to engineer hybrid nanomechanical resonators with precisely tailored functionalities. It also appears as a new tool for studying the growth dynamics of ultrathin nanostructures, opening new opportunities for investigating so far out-of-reach physics of FEBID and related methods. This work is supported by the ERC advanced Grant 692876, ERC PoC Grant 862149, the Foundation Cellex, the CERCA Programme, AGAUR, Severo Ochoa (SEV-2015−0522), the Grants FIS2015-69831-P, RTI2018-097953-B-I00, MAT2017- 82970-C2-1-R, and MAT2017-82970-C2-2-R of MINECO, the Fondo Europeo de Desarrollo Regional (FEDER), and the project E13_17R from Aragon Regional Government (Construyendo Europa desde Aragon). P.V. acknowledges support from the ERC starting Grant 758794 “Q-ROOT”. Peer reviewed American Chemical Society http://hdl.handle.net/10261/208005
title Mass sensing for the advanced fabrication of nanomechanical resonators
spellingShingle Mass sensing for the advanced fabrication of nanomechanical resonators
Gruber, G.
Mechanical resonators
NEMS
Nanofabrication
Mass sensing
Carbon nanotubes
Electron microscopy
title_short Mass sensing for the advanced fabrication of nanomechanical resonators
title_full Mass sensing for the advanced fabrication of nanomechanical resonators
title_fullStr Mass sensing for the advanced fabrication of nanomechanical resonators
title_full_unstemmed Mass sensing for the advanced fabrication of nanomechanical resonators
title_sort Mass sensing for the advanced fabrication of nanomechanical resonators
author Gruber, G.
author_facet Gruber, G.
Urgell, C.
Tavernarakis, A.
Stavrinadis, Alexandros
Tepsic, S.
Magén, César
Sangiao, S.
Teresa, José María de
Verlot, P.
Bachtold, Adrian
author_role author
author2 Urgell, C.
Tavernarakis, A.
Stavrinadis, Alexandros
Tepsic, S.
Magén, César
Sangiao, S.
Teresa, José María de
Verlot, P.
Bachtold, Adrian
author2_role author
author
author
author
author
author
author
author
author
topic Mechanical resonators
NEMS
Nanofabrication
Mass sensing
Carbon nanotubes
Electron microscopy
topic_facet Mechanical resonators
NEMS
Nanofabrication
Mass sensing
Carbon nanotubes
Electron microscopy
description We report on a nanomechanical engineering method to monitor matter growth in real time via e-beam electromechanical coupling. This method relies on the exceptional mass sensing capabilities of nanomechanical resonators. Focused electron beam-induced deposition (FEBID) is employed to selectively grow platinum particles at the free end of singly clamped nanotube cantilevers. The electron beam has two functions: it allows both to grow material on the nanotube and to track in real time the deposited mass by probing the noise-driven mechanical resonance of the nanotube. On the one hand, this detection method is highly effective as it can resolve mass deposition with a resolution in the zeptogram range; on the other hand, this method is simple to use and readily available to a wide range of potential users because it can be operated in existing commercial FEBID systems without making any modification. The presented method allows one to engineer hybrid nanomechanical resonators with precisely tailored functionalities. It also appears as a new tool for studying the growth dynamics of ultrathin nanostructures, opening new opportunities for investigating so far out-of-reach physics of FEBID and related methods.
publishDate 2019
format article
status_str publishedVersion
url http://hdl.handle.net/10261/208005
eu_rights_str_mv openAccess
publisher American Chemical Society
institution Consejo Superior de Investigaciones Científicas (CSIC)
collection DIGITAL.CSIC. Repositorio Institucional del CSIC
reponame_str DIGITAL.CSIC. Repositorio Institucional del CSIC
instname_str Consejo Superior de Investigaciones Científicas (CSIC)
_version_ 1878431636325924864
publishDateSort 2019
author_browse Bachtold, Adrian
Gruber, G.
Magén, César
Sangiao, S.
Stavrinadis, Alexandros
Tavernarakis, A.
Tepsic, S.
Teresa, José María de
Urgell, C.
Verlot, P.
publisherStr American Chemical Society
score 6,9303427

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